Effects of Diffusion on Interfacial Fracture of Multilayer Hybrid Microcircuit Films
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چکیده
In this study, the effect of diffusion on gold-chromium film durability was determined from interfacial fracture energy measurements on laboratory samples aged to simulate long term service. The samples were prepared by sputter deposition of gold films and chromium adhesive layers on sapphire substrates. Some films were left in the as-deposited condition while others were given an accelerated age to drive the chromium off the interface. Stressed overlayers and nanoindentation were then used to induce interfacial delamination and blister formation from which interfacial fracture energies were determined using mechanics-based models. The results clearly showed that diffusion-induced changes in composition and structure of the films markedly alter susceptibility to interfacial fracture.
منابع مشابه
Effects of diffusion on interfacial fracture of gold-chromium hybrid microcircuit films
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تاریخ انتشار 2001